Vacuum coating machine common faults and solutions

Insufficient vacuum: Check whether the seal is aging and whether the vacuum pump works normally.

Uneven coating: Adjust target position, substrate rotation speed or gas flow.

If the device is overheated, check whether the cooling system works properly and clean the heat dissipation components.

Power failure: Check the power lines and controllers, and replace the components if necessary.

Target loss too fast: adjust the sputtering power or replace the target.

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